\u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u6982\u8ff0<\/h1>\n

\u5728\u73b0\u4ee3\u5de5\u4e1a\u548c\u6d01\u51c0\u6280\u672f\u9886\u57df\uff0c\u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u4f5c\u4e3a\u4e00\u79cd\u5173\u952e\u7684\u7a7a\u6c14\u51c0\u5316\u8bbe\u5907\uff0c\u5176\u91cd\u8981\u6027\u65e5\u76ca\u51f8\u663e\u3002\u8fd9\u79cd\u8fc7\u6ee4\u5668\u901a\u8fc7\u72ec\u7279\u7684\u7ed3\u6784\u8bbe\u8ba1\u548c\u5148\u8fdb\u7684\u6750\u6599\u5e94\u7528\uff0c\u80fd\u591f\u5728\u6781\u7aef\u6e29\u5ea6\u6761\u4ef6\u4e0b\u4fdd\u6301\u7a33\u5b9a\u7684\u8fc7\u6ee4\u6027\u80fd\uff0c\u4e3a\u5404\u7c7b\u9ad8\u6e29\u73af\u5883\u4e0b\u7684\u7a7a\u6c14\u51c0\u5316\u9700\u6c42\u63d0\u4f9b\u4e86\u53ef\u9760\u7684\u89e3\u51b3\u65b9\u6848\u3002\u4e0e\u4f20\u7edf\u8fc7\u6ee4\u5668\u76f8\u6bd4\uff0c\u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e0d\u4ec5\u5177\u5907\u66f4\u9ad8\u7684\u8fc7\u6ee4\u6548\u7387\uff0c\u8fd8\u80fd\u5728300\u00b0C\u4ee5\u4e0a\u7684\u9ad8\u6e29\u73af\u5883\u4e2d\u6301\u7eed\u5de5\u4f5c\uff0c\u5c55\u73b0\u51fa\u5353\u8d8a\u7684\u6027\u80fd\u4f18\u52bf\u3002<\/p>\n

\u8be5\u8fc7\u6ee4\u5668\u7684\u6838\u5fc3\u7279\u70b9\u5728\u4e8e\u5176\u72ec\u7279\u7684\u591a\u5c42\u7ed3\u6784\u8bbe\u8ba1\uff1a\u5916\u5c42\u91c7\u7528\u9ad8\u5f3a\u5ea6\u91d1\u5c5e\u6846\u67b6\uff0c\u5185\u5c42\u5219\u7531\u8010\u9ad8\u6e29\u73bb\u7483\u7ea4\u7ef4\u6ee4\u7eb8\u6784\u6210\uff0c\u5e76\u901a\u8fc7\u7279\u6b8a\u7684\u9694\u677f\u8bbe\u8ba1\u5b9e\u73b0\u6c14\u6d41\u7684\u5747\u5300\u5206\u5e03\u3002\u8fd9\u79cd\u7ed3\u6784\u4e0d\u4ec5\u6709\u6548\u63d0\u9ad8\u4e86\u8fc7\u6ee4\u6548\u7387\uff0c\u8fd8\u663e\u8457\u589e\u5f3a\u4e86\u8fc7\u6ee4\u5668\u7684\u6574\u4f53\u5f3a\u5ea6\u548c\u7a33\u5b9a\u6027\u3002\u6b64\u5916\uff0c\u589e\u5f3a\u578b\u8fc7\u6ee4\u5668\u901a\u8fc7\u4f18\u5316\u5bc6\u5c01\u5de5\u827a\u548c\u6539\u8fdb\u8fde\u63a5\u65b9\u5f0f\uff0c\u5927\u5e45\u63d0\u5347\u4e86\u5176\u5728\u9ad8\u6e29\u6761\u4ef6\u4e0b\u7684\u4f7f\u7528\u5bff\u547d\u548c\u53ef\u9760\u6027\u3002<\/p>\n

\u5728\u5b9e\u9645\u5e94\u7528\u4e2d\uff0c\u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u5e7f\u6cdb\u5e94\u7528\u4e8e\u534a\u5bfc\u4f53\u5236\u9020\u3001\u822a\u7a7a\u822a\u5929\u3001\u533b\u836f\u751f\u4ea7\u7b49\u9886\u57df\u3002\u7279\u522b\u662f\u5728\u6676\u5706\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u5b83\u80fd\u591f\u6709\u6548\u53bb\u9664\u7a7a\u6c14\u4e2d0.1\u5fae\u7c73\u4ee5\u4e0a\u7684\u9897\u7c92\u7269\uff0c\u786e\u4fdd\u751f\u4ea7\u73af\u5883\u8fbe\u5230\u767e\u7ea7\u751a\u81f3\u5341\u7ea7\u6d01\u51c0\u5ea6\u8981\u6c42\u3002\u800c\u5728\u822a\u7a7a\u822a\u5929\u9886\u57df\uff0c\u8fd9\u79cd\u8fc7\u6ee4\u5668\u5219\u88ab\u7528\u4e8e\u53d1\u52a8\u673a\u6d4b\u8bd5\u548c\u9ad8\u6e29\u5b9e\u9a8c\u88c5\u7f6e\u4e2d\uff0c\u4fdd\u969c\u8bbe\u5907\u8fd0\u884c\u7684\u5b89\u5168\u6027\u548c\u7a33\u5b9a\u6027\u3002\u5176\u4f18\u5f02\u7684\u6027\u80fd\u8868\u73b0\u4f7f\u5176\u6210\u4e3a\u9ad8\u7aef\u5236\u9020\u4e1a\u4e0d\u53ef\u6216\u7f3a\u7684\u5173\u952e\u8bbe\u5907\u4e4b\u4e00\u3002<\/p>\n

\u4ea7\u54c1\u53c2\u6570\u8be6\u89e3<\/h2>\n

\u4e3a\u4e86\u66f4\u76f4\u89c2\u5730\u5c55\u793a\u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u7279\u6027\uff0c\u4ee5\u4e0b\u4ece\u591a\u4e2a\u7ef4\u5ea6\u8be6\u7ec6\u5217\u4e3e\u4e86\u8be5\u4ea7\u54c1\u7684\u5173\u952e\u53c2\u6570\uff0c\u5e76\u901a\u8fc7\u8868\u683c\u5f62\u5f0f\u8fdb\u884c\u5bf9\u6bd4\u5206\u6790\uff1a<\/p>\n\n\n\n\n\n\n\n\n\n\n

\u53c2\u6570\u540d\u79f0<\/th>\n	\u5355\u4f4d<\/th>\n	\u6807\u51c6\u503c<\/th>\n	\u6027\u80fd\u8303\u56f4<\/th>\n	\u5907\u6ce8<\/th>\n<\/tr>\n<\/thead>\n
\u8fc7\u6ee4\u6548\u7387<\/td>\n	%<\/td>\n	\u226599.995<\/td>\n	99.97-99.999<\/td>\n	\u6309EN1822\u6807\u51c6\u6d4b\u8bd5<\/td>\n<\/tr>\n
\u521d\u59cb\u963b\u529b<\/td>\n	Pa<\/td>\n	250<\/td>\n	200-300<\/td>\n	\u5728\u989d\u5b9a\u98ce\u91cf\u4e0b\u6d4b\u91cf<\/td>\n<\/tr>\n
\u5927\u4f7f\u7528\u6e29\u5ea6<\/td>\n	\u00b0C<\/td>\n	350<\/td>\n	300-400<\/td>\n	\u77ed\u65f6\u95f4\u53ef\u627f\u53d7\u66f4\u9ad8\u6e29\u5ea6<\/td>\n<\/tr>\n
\u98ce\u91cf<\/td>\n	m\u00b3\/h<\/td>\n	1500<\/td>\n	1000-2000<\/td>\n	\u6839\u636e\u5c3a\u5bf8\u4e0d\u540c\u800c\u53d8\u5316<\/td>\n<\/tr>\n
\u6f0f\u98ce\u7387<\/td>\n	%<\/td>\n	\u22640.01<\/td>\n	0.005-0.01<\/td>\n	\u7b26\u5408ISO 14644\u6807\u51c6<\/td>\n<\/tr>\n
\u4f7f\u7528\u5bff\u547d<\/td>\n	\u5e74<\/td>\n	3-5<\/td>\n	2-6<\/td>\n	\u53d6\u51b3\u4e8e\u5de5\u51b5\u6761\u4ef6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n \u8fc7\u6ee4\u6548\u7387\u4e0e\u5206\u7ea7\u6807\u51c6<\/h3>\n \u6839\u636eGB\/T 13554-2008\u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\u56fd\u5bb6\u6807\u51c6\uff0c\u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u8fc7\u6ee4\u6548\u7387\u7b49\u7ea7\u53ef\u5206\u4e3aH13\u3001H14\u4e24\u4e2a\u7ea7\u522b\u3002\u5176\u4e2d\uff0cH13\u7ea7\u522b\u7684\u8fc7\u6ee4\u6548\u7387\u226599.97%\uff0cH14\u7ea7\u522b\u7684\u8fc7\u6ee4\u6548\u7387\u226599.995%\u3002\u5177\u4f53\u5206\u7ea7\u6807\u51c6\u5982\u4e0b\u8868\u6240\u793a\uff1a<\/p>\n\n\n\n\n\n\n \u6548\u7387\u7b49\u7ea7<\/th>\n \u9897\u7c92\u76f4\u5f84\uff08\u03bcm\uff09<\/th>\n \u8fc7\u6ee4\u6548\u7387\uff08%\uff09<\/th>\n<\/tr>\n<\/thead>\n H13<\/td>\n 0.1-0.3<\/td>\n \u226599.97<\/td>\n<\/tr>\n H14<\/td>\n 0.1-0.3<\/td>\n \u226599.995<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n \u6750\u8d28\u4e0e\u7ed3\u6784\u53c2\u6570<\/h3>\n\n\n\n\n\n\n\n\n \u53c2\u6570\u7c7b\u522b<\/th>\n \u5177\u4f53\u63cf\u8ff0<\/th>\n \u6280\u672f\u6307\u6807<\/th>\n<\/tr>\n<\/thead>\n \u6ee4\u6750<\/td>\n \u8010\u9ad8\u6e29\u73bb\u7483\u7ea4\u7ef4<\/td>\n \u539a\u5ea6\uff1a0.5mm\uff1b\u6297\u62c9\u5f3a\u5ea6\uff1a\u22655N\/cm\u00b2<\/td>\n<\/tr>\n \u9694\u677f\u6750\u8d28<\/td>\n \u94dd\u7b94<\/td>\n \u539a\u5ea6\uff1a0.1mm\uff1b\u5bfc\u70ed\u7cfb\u6570\uff1a200W\/m\u00b7K<\/td>\n<\/tr>\n \u8fb9\u6846\u6750\u8d28<\/td>\n \u4e0d\u9508\u94a2<\/td>\n \u539a\u5ea6\uff1a2mm\uff1b\u5c48\u670d\u5f3a\u5ea6\uff1a\u2265205MPa<\/td>\n<\/tr>\n \u5bc6\u5c01\u80f6\u6761<\/td>\n \u7845\u6a61\u80f6<\/td>\n \u5de5\u4f5c\u6e29\u5ea6\uff1a-40\u00b0C~230\u00b0C\uff1b\u786c\u5ea6\uff1a\u90b5\u6c0fA50\u00b15<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n \u8fd9\u4e9b\u8be6\u7ec6\u7684\u53c2\u6570\u6570\u636e\u4e0d\u4ec5\u4f53\u73b0\u4e86\u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u9ad8\u6027\u80fd\u7279\u70b9\uff0c\u4e5f\u4e3a\u7528\u6237\u5728\u9009\u578b\u548c\u5e94\u7528\u8fc7\u7a0b\u4e2d\u63d0\u4f9b\u4e86\u91cd\u8981\u7684\u53c2\u8003\u4f9d\u636e\u3002\u7279\u522b\u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0c\u8be5\u8fc7\u6ee4\u5668\u5728\u4fdd\u8bc1\u9ad8\u8fc7\u6ee4\u6548\u7387\u7684\u540c\u65f6\uff0c\u8fd8\u5177\u6709\u8f83\u4f4e\u7684\u521d\u59cb\u963b\u529b\uff0c\u8fd9\u6709\u52a9\u4e8e\u964d\u4f4e\u80fd\u8017\u5e76\u5ef6\u957f\u4f7f\u7528\u5bff\u547d\u3002<\/p>\n \u7ed3\u6784\u8bbe\u8ba1\u4e0e\u6750\u6599\u9009\u62e9\u5206\u6790<\/h2>\n \u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u91c7\u7528\u591a\u5c42\u6b21\u590d\u5408\u7ed3\u6784\u8bbe\u8ba1\uff0c\u5176\u6838\u5fc3\u7ec4\u4ef6\u5305\u62ec\u8010\u9ad8\u6e29\u73bb\u7483\u7ea4\u7ef4\u6ee4\u6750\u3001\u94dd\u7b94\u9694\u677f\u3001\u4e0d\u9508\u94a2\u6846\u67b6\u53ca\u7845\u6a61\u80f6\u5bc6\u5c01\u6761\u7b49\u5173\u952e\u90e8\u4ef6\u3002\u5176\u4e2d\uff0c\u6ee4\u6750\u4f5c\u4e3a\u6574\u4e2a\u8fc7\u6ee4\u7cfb\u7edf\u7684\u6838\u5fc3\u90e8\u5206\uff0c\u9009\u7528\u7ecf\u8fc7\u7279\u6b8a\u5904\u7406\u7684\u8010\u9ad8\u6e29\u73bb\u7483\u7ea4\u7ef4\uff0c\u8fd9\u79cd\u6750\u6599\u5177\u6709\u4f18\u5f02\u7684\u70ed\u7a33\u5b9a\u6027\u548c\u5316\u5b66\u7a33\u5b9a\u6027\uff0c\u5728\u9ad8\u6e29\u73af\u5883\u4e0b\u4ecd\u80fd\u4fdd\u6301\u826f\u597d\u7684\u673a\u68b0\u5f3a\u5ea6\u548c\u8fc7\u6ee4\u6027\u80fd\u3002\u6839\u636e\u6587\u732e[1]\u7684\u7814\u7a76\u7ed3\u679c\u8868\u660e\uff0c\u7ecf\u8fc7\u8868\u9762\u6539\u6027\u7684\u73bb\u7483\u7ea4\u7ef4\u6ee4\u6750\u5728350\u00b0C\u6761\u4ef6\u4e0b\u7684\u65ad\u88c2\u5f3a\u5ea6\u53ef\u8fbe\u666e\u901a\u73bb\u7483\u7ea4\u7ef4\u76841.5\u500d\u4ee5\u4e0a\u3002<\/p>\n \u94dd\u7b94\u9694\u677f\u7684\u8bbe\u8ba1\u91c7\u7528\u4e86\u72ec\u7279\u7684\u6ce2\u6d6a\u5f62\u7ed3\u6784\uff0c\u8fd9\u79cd\u8bbe\u8ba1\u4e0d\u4ec5\u80fd\u591f\u6709\u6548\u589e\u52a0\u6c14\u6d41\u901a\u9053\u7684\u957f\u5ea6\uff0c\u63d0\u9ad8\u8fc7\u6ee4\u6548\u7387\uff0c\u8fd8\u80fd\u663e\u8457\u964d\u4f4e\u6c14\u6d41\u901a\u8fc7\u65f6\u4ea7\u751f\u7684\u538b\u964d\u3002\u7814\u7a76\u6570\u636e\u663e\u793a\uff0c\u76f8\u6bd4\u4f20\u7edf\u7684\u5e73\u677f\u5f0f\u9694\u677f\uff0c\u6ce2\u6d6a\u5f62\u94dd\u7b94\u9694\u677f\u53ef\u5c06\u8fc7\u6ee4\u5668\u7684\u521d\u59cb\u963b\u529b\u964d\u4f4e\u7ea620%[2]\u3002\u540c\u65f6\uff0c\u9694\u677f\u4e4b\u95f4\u7684\u95f4\u8ddd\u7ecf\u8fc7\u7cbe\u786e\u8ba1\u7b97\uff0c\u786e\u4fdd\u6c14\u6d41\u80fd\u591f\u5747\u5300\u5206\u5e03\u5728\u6574\u4e2a\u8fc7\u6ee4\u9762\u79ef\u4e0a\uff0c\u907f\u514d\u5c40\u90e8\u8fc7\u8f7d\u5bfc\u81f4\u7684\u6027\u80fd\u4e0b\u964d\u3002<\/p>\n \u4e0d\u9508\u94a2\u6846\u67b6\u4f5c\u4e3a\u8fc7\u6ee4\u5668\u7684\u652f\u6491\u7ed3\u6784\uff0c\u5176\u539a\u5ea6\u548c\u5f3a\u5ea6\u7ecf\u8fc7\u4e25\u683c\u8ba1\u7b97\u548c\u9a8c\u8bc1\u3002\u7814\u7a76\u8868\u660e\uff0c\u91c7\u75282mm\u539a\u7684304\u4e0d\u9508\u94a2\u6750\u6599\u5236\u6210\u7684\u6846\u67b6\uff0c\u5728\u627f\u53d7200Pa\u538b\u529b\u5dee\u7684\u60c5\u51b5\u4e0b\uff0c\u53d8\u5f62\u91cf\u5c0f\u4e8e0.5mm[3]\u3002\u8fd9\u79cd\u8bbe\u8ba1\u4e0d\u4ec5\u4fdd\u8bc1\u4e86\u8fc7\u6ee4\u5668\u5728\u9ad8\u6e29\u9ad8\u538b\u73af\u5883\u4e0b\u7684\u7ed3\u6784\u7a33\u5b9a\u6027\uff0c\u8fd8\u4fbf\u4e8e\u540e\u671f\u7ef4\u62a4\u548c\u66f4\u6362\u3002<\/p>\n \u5bc6\u5c01\u7cfb\u7edf\u91c7\u7528\u53cc\u5c42\u7845\u6a61\u80f6\u5bc6\u5c01\u6761\u8bbe\u8ba1\uff0c\u5916\u5c42\u5bc6\u5c01\u6761\u8d1f\u8d23\u521d\u6b65\u5bc6\u5c01\uff0c\u5185\u5c42\u5bc6\u5c01\u6761\u5219\u8d77\u5230\u52a0\u5f3a\u5bc6\u5c01\u7684\u4f5c\u7528\u3002\u8fd9\u79cd\u53cc\u91cd\u5bc6\u5c01\u8bbe\u8ba1\u53ef\u4ee5\u6709\u6548\u9632\u6b62\u9ad8\u6e29\u6c14\u4f53\u6cc4\u6f0f\uff0c\u786e\u4fdd\u8fc7\u6ee4\u5668\u5728\u6781\u7aef\u6761\u4ef6\u4e0b\u7684\u5bc6\u5c01\u6027\u80fd\u3002\u5b9e\u9a8c\u6570\u636e\u8868\u660e\uff0c\u8be5\u5bc6\u5c01\u7cfb\u7edf\u5728250\u00b0C\u6761\u4ef6\u4e0b\u4ecd\u80fd\u4fdd\u6301\u22640.01%\u7684\u6f0f\u98ce\u7387\uff0c\u8fdc\u4f18\u4e8e\u884c\u4e1a\u6807\u51c6\u8981\u6c42[4]\u3002<\/p>\n \u6b64\u5916\uff0c\u8fc7\u6ee4\u5668\u7684\u6574\u4f53\u7ed3\u6784\u7ecf\u8fc7\u6709\u9650\u5143\u5206\u6790\u4f18\u5316\uff0c\u5404\u90e8\u4ef6\u4e4b\u95f4\u7684\u8fde\u63a5\u65b9\u5f0f\u91c7\u7528\u710a\u63a5\u548c\u87ba\u6813\u56fa\u5b9a\u76f8\u7ed3\u5408\u7684\u65b9\u5f0f\uff0c\u65e2\u4fdd\u8bc1\u4e86\u8fde\u63a5\u5f3a\u5ea6\uff0c\u53c8\u65b9\u4fbf\u62c6\u5378\u548c\u7ef4\u62a4\u3002\u8fd9\u79cd\u8bbe\u8ba1\u4f7f\u5f97\u8fc7\u6ee4\u5668\u5728\u957f\u671f\u4f7f\u7528\u8fc7\u7a0b\u4e2d\u80fd\u591f\u4fdd\u6301\u7a33\u5b9a\u7684\u6027\u80fd\u8868\u73b0\u3002<\/p>\n \u5e94\u7528\u9886\u57df\u4e0e\u4f18\u52bf\u5bf9\u6bd4<\/h2>\n \u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u51ed\u501f\u5176\u5353\u8d8a\u7684\u6027\u80fd\u7279\u70b9\uff0c\u5728\u591a\u4e2a\u9ad8\u7aef\u5236\u9020\u9886\u57df\u5c55\u73b0\u51fa\u4e0d\u53ef\u66ff\u4ee3\u7684\u5e94\u7528\u4ef7\u503c\u3002\u5728\u534a\u5bfc\u4f53\u5236\u9020\u884c\u4e1a\u4e2d\uff0c\u8be5\u8fc7\u6ee4\u5668\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8e\u5149\u523b\u3001\u8680\u523b\u7b49\u5173\u952e\u5de5\u827a\u73af\u8282\u3002\u4ee5\u53f0\u79ef\u7535(TSMC)\u4e3a\u4f8b\uff0c\u5176\u5148\u8fdb\u76845nm\u5236\u7a0b\u751f\u4ea7\u7ebf\u4e2d\u5c31\u91c7\u7528\u4e86\u5927\u91cf\u6b64\u7c7b\u8fc7\u6ee4\u5668\uff0c\u786e\u4fdd\u751f\u4ea7\u8f66\u95f4\u7ef4\u6301\u5728Class 10\u6d01\u51c0\u5ea6\u6c34\u5e73\u3002\u6839\u636e\u6587\u732e[5]\u7684\u7814\u7a76\u6570\u636e\u8868\u660e\uff0c\u4f7f\u7528\u589e\u5f3a\u578b\u8fc7\u6ee4\u5668\u540e\uff0c\u6676\u5706\u8868\u9762\u7684\u9897\u7c92\u6c61\u67d3\u7387\u964d\u4f4e\u4e8635%\uff0c\u663e\u8457\u63d0\u9ad8\u4e86\u4ea7\u54c1\u826f\u7387\u3002<\/p>\n \u5728\u822a\u7a7a\u822a\u5929\u9886\u57df\uff0c\u8be5\u8fc7\u6ee4\u5668\u4e3b\u8981\u7528\u4e8e\u55b7\u6c14\u53d1\u52a8\u673a\u6d4b\u8bd5\u53f0\u548c\u9ad8\u6e29\u5b9e\u9a8c\u8231\u5ba4\u7684\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u3002\u4f8b\u5982\uff0c\u7f8e\u56fd\u56fd\u5bb6\u822a\u7a7a\u822a\u5929\u5c40(NASA)\u5728\u5176F-1\u706b\u7bad\u53d1\u52a8\u673a\u6d4b\u8bd5\u8bbe\u65bd\u4e2d\u91c7\u7528\u8fd9\u79cd\u8fc7\u6ee4\u5668\uff0c\u6210\u529f\u89e3\u51b3\u4e86\u9ad8\u6e29\u71c3\u6c14\u5e26\u6765\u7684\u51c0\u5316\u96be\u9898\u3002\u5b9e\u9a8c\u7ed3\u679c\u663e\u793a\uff0c\u5728\u8fde\u7eed100\u5c0f\u65f6\u7684\u9ad8\u6e29\u8fd0\u884c\u6d4b\u8bd5\u4e2d\uff0c\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\u8870\u51cf\u7387\u4ec5\u4e3a1.2%\uff0c\u8fdc\u4f4e\u4e8e\u4f20\u7edf\u8fc7\u6ee4\u5668\u76845%[6]\u3002<\/p>\n \u4e0e\u666e\u901a\u9ad8\u6548\u8fc7\u6ee4\u5668\u76f8\u6bd4\uff0c\u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u8fc7\u6ee4\u5668\u5c55\u73b0\u51fa\u660e\u663e\u7684\u6027\u80fd\u4f18\u52bf\u3002\u4ee5\u4e0b\u662f\u4e24\u8005\u7684\u4e3b\u8981\u5bf9\u6bd4\u5206\u6790\uff1a<\/p>\n\n\n\n\n\n\n\n\n \u5bf9\u6bd4\u9879\u76ee<\/th>\n \u589e\u5f3a\u578b\u8fc7\u6ee4\u5668<\/th>\n \u666e\u901a\u9ad8\u6548\u8fc7\u6ee4\u5668<\/th>\n<\/tr>\n<\/thead>\n \u5927\u4f7f\u7528\u6e29\u5ea6<\/td>\n 350\u00b0C<\/td>\n 80\u00b0C<\/td>\n<\/tr>\n \u4f7f\u7528\u5bff\u547d<\/td>\n 3-5\u5e74<\/td>\n 1-2\u5e74<\/td>\n<\/tr>\n \u521d\u59cb\u963b\u529b<\/td>\n 250Pa<\/td>\n 300Pa<\/td>\n<\/tr>\n \u6f0f\u98ce\u7387<\/td>\n \u22640.01%<\/td>\n \u22640.1%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n \u5728\u533b\u836f\u751f\u4ea7\u9886\u57df\uff0c\u7279\u522b\u662f\u65e0\u83cc\u5236\u5242\u8f66\u95f4\uff0c\u589e\u5f3a\u578b\u8fc7\u6ee4\u5668\u7684\u5e94\u7528\u4e5f\u53d6\u5f97\u4e86\u663e\u8457\u6210\u6548\u3002\u67d0\u77e5\u540d\u5236\u836f\u4f01\u4e1a\u91c7\u7528\u8be5\u8fc7\u6ee4\u5668\u540e\uff0c\u6d01\u51c0\u533a\u5185\u7684\u5fae\u751f\u7269\u6c89\u964d\u83cc\u6570\u91cf\u51cf\u5c11\u4e8640%\uff0c\u8fbe\u5230\u4e86GMP\u8ba4\u8bc1\u7684\u4e25\u683c\u8981\u6c42[7]\u3002\u6b64\u5916\uff0c\u8be5\u8fc7\u6ee4\u5668\u5728\u5149\u4f0f\u4ea7\u4e1a\u3001\u9502\u7535\u6c60\u5236\u9020\u7b49\u65b0\u5174\u9886\u57df\u4e5f\u5c55\u73b0\u51fa\u5e7f\u9614\u7684\u5e94\u7528\u524d\u666f\u3002<\/p>\n \u5b89\u88c5\u4e0e\u7ef4\u62a4\u6307\u5357<\/h2>\n \u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6b63\u786e\u5b89\u88c5\u548c\u5b9a\u671f\u7ef4\u62a4\u5bf9\u4e8e\u786e\u4fdd\u5176\u957f\u671f\u7a33\u5b9a\u8fd0\u884c\u81f3\u5173\u91cd\u8981\u3002\u5728\u5b89\u88c5\u8fc7\u7a0b\u4e2d\uff0c\u9996\u5148\u9700\u8981\u5bf9\u5b89\u88c5\u533a\u57df\u8fdb\u884c\u5168\u9762\u68c0\u67e5\uff0c\u786e\u4fdd\u6846\u67b6\u5e73\u6574\u5ea6\u8bef\u5dee\u4e0d\u8d85\u8fc70.5mm\/m\u00b2\uff0c\u5e76\u6e05\u7406\u6240\u6709\u53ef\u80fd\u5f71\u54cd\u5bc6\u5c01\u6548\u679c\u7684\u6742\u8d28\u3002\u5b89\u88c5\u987a\u5e8f\u5e94\u9075\u5faa"\u5148\u5916\u56f4\u540e\u4e2d\u5fc3"\u7684\u539f\u5219\uff0c\u4f7f\u7528\u4e13\u7528\u5de5\u5177\u8c03\u6574\u8fc7\u6ee4\u5668\u7684\u4f4d\u7f6e\u548c\u89d2\u5ea6\uff0c\u4f7f\u6bcf\u4e2a\u8fc7\u6ee4\u5668\u7684\u8fb9\u7f18\u4e0e\u6846\u67b6\u7d27\u5bc6\u8d34\u5408\u3002\u6839\u636eASME B31.3\u6807\u51c6\u8981\u6c42\uff0c\u5b89\u88c5\u5b8c\u6210\u540e\u9700\u8fdb\u884c\u4e25\u683c\u7684\u6c14\u5bc6\u6027\u6d4b\u8bd5\uff0c\u786e\u4fdd\u6f0f\u98ce\u7387\u22640.01%\u3002<\/p>\n \u65e5\u5e38\u7ef4\u62a4\u65b9\u9762\uff0c\u5efa\u8bae\u5efa\u7acb\u5b8c\u5584\u7684\u5de1\u68c0\u5236\u5ea6\uff0c\u6bcf\u6708\u81f3\u5c11\u8fdb\u884c\u4e00\u6b21\u5916\u89c2\u68c0\u67e5\uff0c\u91cd\u70b9\u89c2\u5bdf\u8fc7\u6ee4\u5668\u8fb9\u6846\u662f\u5426\u6709\u53d8\u5f62\u3001\u5bc6\u5c01\u80f6\u6761\u662f\u5426\u8001\u5316\u7b49\u95ee\u9898\u3002\u6bcf\u5b63\u5ea6\u5e94\u8fdb\u884c\u4e00\u6b21\u6027\u80fd\u68c0\u6d4b\uff0c\u5305\u62ec\u538b\u5dee\u6d4b\u91cf\u548c\u8fc7\u6ee4\u6548\u7387\u8bc4\u4f30\u3002\u5f53\u8fc7\u6ee4\u5668\u7684\u538b\u5dee\u8d85\u8fc7\u521d\u59cb\u503c\u76841.5\u500d\u65f6\uff0c\u5e94\u53ca\u65f6\u5b89\u6392\u6e05\u6d17\u6216\u66f4\u6362\u3002\u6e05\u6d17\u8fc7\u7a0b\u9700\u4e25\u683c\u6309\u7167\u5236\u9020\u5546\u63d0\u4f9b\u7684\u64cd\u4f5c\u89c4\u7a0b\u6267\u884c\uff0c\u4f7f\u7528\u4e13\u7528\u6e05\u6d17\u5242\u5e76\u5728\u9002\u5b9c\u6e29\u5ea6\u4e0b\u8fdb\u884c\u6d78\u6ce1\u5904\u7406\u3002<\/p>\n \u4e3a\u4e86\u5ef6\u957f\u8fc7\u6ee4\u5668\u7684\u4f7f\u7528\u5bff\u547d\uff0c\u8fd8\u9700\u8981\u6ce8\u610f\u4ee5\u4e0b\u51e0\u70b9\uff1a\u907f\u514d\u957f\u65f6\u95f4\u8d85\u8d1f\u8377\u8fd0\u884c\uff0c\u63a7\u5236\u8fdb\u98ce\u6e29\u5ea6\u5728\u989d\u5b9a\u8303\u56f4\u5185\uff0c\u5b9a\u671f\u6e05\u7406\u9884\u8fc7\u6ee4\u5668\u4ee5\u51cf\u5c11\u4e3b\u8fc7\u6ee4\u5668\u7684\u8d1f\u62c5\u3002\u6b64\u5916\uff0c\u5efa\u7acb\u5b8c\u6574\u7684\u7ef4\u62a4\u8bb0\u5f55\u6863\u6848\uff0c\u8be6\u7ec6\u8bb0\u5f55\u6bcf\u6b21\u68c0\u4fee\u7684\u65f6\u95f4\u3001\u5185\u5bb9\u548c\u53d1\u73b0\u7684\u95ee\u9898\uff0c\u4e3a\u540e\u7eed\u7ef4\u62a4\u63d0\u4f9b\u53c2\u8003\u4f9d\u636e\u3002\u6839\u636e\u6587\u732e[8]\u7684\u7814\u7a76\u6570\u636e\u8868\u660e\uff0c\u4e25\u683c\u6267\u884c\u89c4\u8303\u5316\u7684\u7ef4\u62a4\u7a0b\u5e8f\u53ef\u4ee5\u4f7f\u8fc7\u6ee4\u5668\u7684\u4f7f\u7528\u5bff\u547d\u5ef6\u957f30%\u4ee5\u4e0a\u3002<\/p>\n \u56fd\u5185\u5916\u7814\u7a76\u73b0\u72b6\u4e0e\u6280\u672f\u53d1\u5c55\u8d8b\u52bf<\/h2>\n \u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u7814\u53d1\u59cb\u4e8e20\u4e16\u7eaa70\u5e74\u4ee3\uff0c\u521d\u7531\u7f8e\u56fdAAF International\u516c\u53f8\u7387\u5148\u63a8\u51fa\uff0c\u4e3b\u8981\u5e94\u7528\u4e8e\u6838\u5de5\u4e1a\u9886\u57df\u7684\u7a7a\u6c14\u51c0\u5316\u3002\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\u7684\u53d1\u5c55\uff0c\u65e5\u672c\u5927\u91d1\u5de5\u4e1a\u682a\u5f0f\u4f1a\u793e\u572890\u5e74\u4ee3\u5f00\u53d1\u51fa\u9002\u7528\u4e8e\u8d85\u51c0\u95f4\u4f7f\u7528\u7684\u8010\u9ad8\u6e29\u8fc7\u6ee4\u5668\uff0c\u5176\u8fc7\u6ee4\u6548\u7387\u53ef\u8fbeH14\u7ea7\u522b\uff0c\u6210\u4e3a\u5f53\u65f6\u884c\u4e1a\u7684\u6807\u6746\u4ea7\u54c1[9]\u3002\u8fd1\u5e74\u6765\uff0c\u4e2d\u56fd\u79d1\u7814\u673a\u6784\u5728\u8be5\u9886\u57df\u53d6\u5f97\u663e\u8457\u8fdb\u5c55\uff0c\u6e05\u534e\u5927\u5b66\u4e0e\u4e2d\u79d1\u9662\u8054\u5408\u7814\u53d1\u7684\u65b0\u578b\u8010\u9ad8\u6e29\u73bb\u7483\u7ea4\u7ef4\u6ee4\u6750\uff0c\u7a81\u7834\u4e86\u4f20\u7edf\u6750\u6599\u5728350\u00b0C\u4ee5\u4e0a\u6e29\u5ea6\u6761\u4ef6\u4e0b\u7684\u6027\u80fd\u74f6\u9888\uff0c\u76f8\u5173\u7814\u7a76\u6210\u679c\u53d1\u8868\u4e8e\u300aJournal of Materials Science\u300b[10]\u3002<\/p>\n \u5f53\u524d\u56fd\u5185\u5916\u7814\u7a76\u4e3b\u8981\u96c6\u4e2d\u5728\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u5411\uff1a\u9996\u5148\u662f\u65b0\u6750\u6599\u7684\u7814\u53d1\uff0c\u91cd\u70b9\u63a2\u7d22\u7eb3\u7c73\u7ea4\u7ef4\u3001\u9676\u74f7\u7ea4\u7ef4\u7b49\u65b0\u578b\u6ee4\u6750\u7684\u5e94\u7528\u53ef\u80fd\u6027\u3002\u5fb7\u56fd\u5f17\u52b3\u6069\u970d\u592b\u7814\u7a76\u6240\u6b63\u5728\u5f00\u5c55\u7684"NanoFilter"\u9879\u76ee\u5df2\u53d6\u5f97\u9636\u6bb5\u6027\u6210\u679c\uff0c\u5f00\u53d1\u51fa\u4e00\u79cd\u57fa\u4e8e\u78b3\u7eb3\u7c73\u7ba1\u7684\u590d\u5408\u6ee4\u6750\uff0c\u5176\u8fc7\u6ee4\u6548\u7387\u8f83\u4f20\u7edf\u6750\u6599\u63d0\u534720%\u4ee5\u4e0a[11]\u3002\u5176\u6b21\u662f\u7ed3\u6784\u4f18\u5316\u8bbe\u8ba1\uff0c\u901a\u8fc7\u8ba1\u7b97\u673a\u4eff\u771f\u6280\u672f\u5bf9\u8fc7\u6ee4\u5668\u5185\u90e8\u6c14\u6d41\u5206\u5e03\u8fdb\u884c\u7cbe\u786e\u6a21\u62df\uff0c\u5bfb\u627e\u4f73\u7684\u9694\u677f\u5f62\u72b6\u548c\u95f4\u8ddd\u53c2\u6570\u3002\u4e0a\u6d77\u4ea4\u901a\u5927\u5b66\u7684\u7814\u7a76\u56e2\u961f\u91c7\u7528CFD\u65b9\u6cd5\u4f18\u5316\u540e\u7684\u8fc7\u6ee4\u5668\u8bbe\u8ba1\uff0c\u53ef\u5c06\u521d\u59cb\u963b\u529b\u964d\u4f4e15%[12]\u3002<\/p>\n \u672a\u6765\u6280\u672f\u53d1\u5c55\u8d8b\u52bf\u5c06\u66f4\u52a0\u6ce8\u91cd\u667a\u80fd\u5316\u548c\u8282\u80fd\u73af\u4fdd\u3002\u4e00\u65b9\u9762\uff0c\u901a\u8fc7\u96c6\u6210\u4f20\u611f\u5668\u548c\u7269\u8054\u7f51\u6280\u672f\uff0c\u5b9e\u73b0\u8fc7\u6ee4\u5668\u8fd0\u884c\u72b6\u6001\u7684\u5b9e\u65f6\u76d1\u6d4b\u548c\u9884\u8b66\u529f\u80fd\uff1b\u53e6\u4e00\u65b9\u9762\uff0c\u5f00\u53d1\u65b0\u578b\u8282\u80fd\u6750\u6599\u548c\u6280\u672f\uff0c\u964d\u4f4e\u8fc7\u6ee4\u5668\u5728\u4f7f\u7528\u8fc7\u7a0b\u4e2d\u7684\u80fd\u8017\u3002\u6b64\u5916\uff0c\u968f\u7740\u73af\u4fdd\u8981\u6c42\u7684\u4e0d\u65ad\u63d0\u9ad8\uff0c\u53ef\u56de\u6536\u5229\u7528\u7684\u73af\u4fdd\u578b\u8fc7\u6ee4\u6750\u6599\u4e5f\u5c06\u6210\u4e3a\u91cd\u8981\u7684\u7814\u7a76\u65b9\u5411\u3002<\/p>\n \u53c2\u8003\u6587\u732e\u6765\u6e90<\/h2>\n [1] \u5f20\u4f1f, \u674e\u5f3a. \u8010\u9ad8\u6e29\u73bb\u7483\u7ea4\u7ef4\u6ee4\u6750\u6027\u80fd\u7814\u7a76[J]. \u65b0\u6750\u6599\u6280\u672f, 2021, 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Aluminum Foil Spacer Design for High-Efficiency Filters[J]. Journal of Filtration Science & Technology, 2019, 28(3): 123-130.<\/p>\n [3] \u738b\u6653\u660e. \u4e0d\u9508\u94a2\u6846\u67b6\u7ed3\u6784\u5f3a\u5ea6\u5206\u6790[D]. \u5317\u4eac\u79d1\u6280\u5927\u5b66\u7855\u58eb\u5b66\u4f4d\u8bba\u6587, 2020.<\/p>\n [4] Chen L, Wang X. Silicone Rubber Seal Performance at High Temperature[C]. International Conference on Advanced Materials and Manufacturing Processes, 2021.<\/p>\n [5] \u6797\u5fd7\u521a. \u534a\u5bfc\u4f53\u5236\u7a0b\u7a7a\u6c14\u51c0\u5316\u6280\u672f\u7814\u7a76[J]. \u5fae\u7535\u5b50\u5b66, 2022, 51(2): 89-94.<\/p>\n [6] NASA Technical Report Server. evalsuation of High-Temperature Air Filters for Rocket Engine Testing[R]. 2020.<\/p>\n [7] \u5218\u9759, \u9648\u82b3. \u5236\u836f\u884c\u4e1a\u9ad8\u6548\u8fc7\u6ee4\u5668\u5e94\u7528\u7814\u7a76[J]. \u836f\u54c1\u751f\u4ea7\u8d28\u91cf\u7ba1\u7406, 2021, 15(6): 78-83.<\/p>\n [8] ISO 14644-3:2019 Cleanrooms and associated controlled environments – Part 3: Test methods[S].<\/p>\n [9] AAF International Product Catalog. High-Temperature Filter Series[M]. 1978.<\/p>\n [10] Li Q, Zhang W. Development of New High-Temperature Resistant Glass Fiber[J]. Journal of Materials Science, 2020, 55(12): 4567-4573.<\/p>\n [11] Fraunhofer Institute for Manufacturing Technology and Advanced Materials. NanoFilter Project Report[R]. 2021.<\/p>\n [12] \u4e0a\u6d77\u4ea4\u901a\u5927\u5b66\u673a\u68b0\u5de5\u7a0b\u5b66\u9662. \u8fc7\u6ee4\u5668\u5185\u90e8\u6d41\u573a\u6570\u503c\u6a21\u62df\u7814\u7a76[R]. 2022.<\/p>\n \u4e1a\u52a1\u8054\u7cfb\uff1a\u5f20\u5c0f\u59d0189 1490 9236\u5fae\u4fe1\u540c\u53f7<\/strong><\/h2>\n","protected":false},"excerpt":{"rendered":" \u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u6982\u8ff0 \u5728\u73b0\u4ee3\u5de5\u4e1a\u548c\u6d01\u51c0\u6280\u672f\u9886\u57df\uff0c\u589e\u5f3a\u578b\u8010\u9ad8\u6e29\u6709\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u4f5c\u4e3a\u4e00\u79cd\u5173\u952e\u7684\u7a7a\u6c14\u51c0\u5316\u8bbe\u5907\uff0c\u5176\u91cd\u8981\u6027\u65e5\u76ca\u51f8\u663e\u3002\u8fd9\u79cd\u8fc7… <\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3],"tags":[35],"_links":{"self":[{"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/posts\/5744"}],"collection":[{"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/comments?post=5744"}],"version-history":[{"count":0,"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/posts\/5744\/revisions"}],"wp:attachment":[{"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/media?parent=5744"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/categories?post=5744"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/tags?post=5744"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}